Ellipsometry is a very sensitive technique to measure thin films and antireflection (AR) coatings. However, it usually works for flat samples only. By using our patented technique in combination with the Imaging Ellipsometer ep4 on curved surfaces, we can overcome this issue and measure e.g. AR coatings on micro-lens-arrays.

• Measure layer thickness and refractive index on curved surfaces
• Investigate anti-reflection coatings on lenses, curved mirrors and micro-lens-arrays
• Determine thickness distribution of multiple objects within a single measurement