Displays | Park Systems GmbH

Parallel measurement of multiple regions

Parallel measurement of multiple regions

Each region corresponds to another layer stack

Each region corresponds to another layer stack

Each region corresponds to another layer stack

Each region corresponds to another layer stack

Spectroscopic measurements on few micron small regions, using patented ROI (Region Of Interest) concept
Each ROI (Region Of Interest) corresponds to another layer stack
⇒ Multiple measurements in a single run
Coupling thicknesses between different models allows uncorrelating the results of multi layer films
UV wavelength range down to 190nm to characterize display materials
Multiple results from a single measurement: Thicknesses, optical dispersions, compositions
Pattented RCE6 mode allows tact times of < 20s

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