- Spectroscopic ellipsometry on small optical fibers and waveguides with lateral resolution down to 1µm
- Precise refractive index measurement on waveguides, vertical facets and fiber ends with relative refractive index difference < 0.001
- Precise film thickness measurement with 0.1nm thickness resolution
- Wavelength range 190nm - 1700nm (IR upgrade to 2700nm possible)
- Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations
- ECM mode (Ellipsometric Contrast enhanced Microscopy) for fast quality control
Typical applications include:
- Photonics and waveguides
- Integrated photonics
- Vertical facets
- Optical fibers